High Resolution Focused Ion Beams: FIB and its Applications: by Jon Orloff

By Jon Orloff

In this booklet, we now have tried to supply a reference on excessive solution concentrated ion beams (FIBs) that might be valuable for either the person and the fashion designer of FIB instrumentation. we have now incorporated a mixture of thought and functions that appeared most respected to us.
The box of FIBs has complicated speedily because the software of the 1st box emission ion resources within the early Nineteen Seventies. the improvement of the liquid steel ion resource (LMIS) within the overdue Nineteen Sixties and early Nineteen Seventies and its program for FIBs within the overdue Nineteen Seventies have ended in a robust device for study and for undefined. there were hundreds of thousands of papers written on many points of LMIS and FIBs, and an invaluable and informative publication on those matters was once released in 1991 by means of Phil Prewett and Grame Mair. simply because there were such a lot of new functions and makes use of chanced on for FIBs within the final ten years we felt that it was once time for an additional booklet at the topic.

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Extra resources for High Resolution Focused Ion Beams: FIB and its Applications: The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology

Sample text

They were then able to convert the expression for the electrostatic energy, a volume integral over the electric fields, to a two dimensional integral over the surface of the liquid. The result was to recover equation 1, but in a rigorous way. Gomer developed an analytical model to explain the rounding or blunting of the Taylor cone that is physically necessary in order to avoid an infinite electric field at the cone apex. Because the Taylor cone condition would be violated by a rounded apex where the electric field stress would exceed the surface tension force, it was necessary to find an explanation; the implication is that the static Taylor cone model must be modified to explain the dynamical LMIS behavior.

2 nm for a field strength 10 10 V1M. When the field is sufficiently strong the energy levels of the atom plus metal and the ion plus metal plus electron overlap and there is a high probability for a transition from the state of a neutral atom which evaporates over the reduced energy barrier Q, to the ionic state. The mechanism by which this takes place is interesting but a side topic to the discussion ofLMIS. It is discussed in some detail in Appendix l. The purpose of this section is to give the reader a very brief description to the processes in which ions are produced at surfaces in a high electric field.

Uo may be set equal to zero if one assumes the velocity at the base of the fluid jet is negligible compared to the velocity at the apex. 20) dt Eo The first term is the kinetic energy term and is proportional to K4. 5 nanometers. The surface tension term dominates for R > 5 nanometers. 21) I = ne 2 n V z rdr J with Vz and tan S as defined, r cos Sdr = R2/(dRldz)2 sinS/cos2 SdS. 22) The effect of the fluid velocity on the shape of the Taylor cone would be large only if the velocity were high (of the order of the velocity of sound in the fluid).

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